journal6 ›› 2008, Vol. 29 ›› Issue (2): 77-78.

• Physics and electronics • Previous Articles     Next Articles

Semiconductor Diffuse Kiln Temperature Control Modeling Based on  BF  NN


  1. (Department of Physics & Electronic Information Technology,Xiangfan University,Xiangfan  441053,Hubei  China)
  • Online:2008-03-25 Published:2012-05-25

Abstract: According to the problem of temperature control of semiconductor diffuse kiln,an new control approach is described in the paper,such as BF NN.The RBF NN construct is 3-9-3.Simulation results show that control method has high quality and high effect.

Key words: semiconductor diffuse kiln, BF NN, network model

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