journal6 ›› 2000, Vol. 21 ›› Issue (4): 36-40.

• 物理与电子 • 上一篇    下一篇

硅加速度计动态I/O特性的标定和数据采集

  

  1. ( 1. 清华大学微电子学研究所, 北京 100084; 2.吉首大学传感器研究所, 湖南 吉首 416000)
  • 出版日期:2000-12-15 发布日期:2013-01-05
  • 作者简介:刘理天( 1943~ ) ,男, 江西省南昌市人,清华大学微电子学研究所教授, 博士生导师, 主要研究微电子机械集成系统.
  • 基金资助:

    国家计委重点科技攻关项目( 97- 760- 03- 02)

Standarding and Data Acquisition on Dynamic I/O Characteristic Curve of Silicon Accelerometer

  1. ( 1. Institute of Microelectronic,Tsinghua University, 100084, Beijing China;2. Institute of Sensor, Jishou University, Jishou 416000, Hunan China)
  • Online:2000-12-15 Published:2013-01-05

摘要:介绍了振动台测量控制系统、标定振动g值及减小标定误差的技术. 在此基础上, 介绍了利用HP34401A 型数字万用表和微型计算机进行数据采集的通信技巧和编程技巧. 利用这套系统,对笔者联合研制开发的仪表级压阻式硅加速度计动态I/O特性进行了大量的测试标定和数据采集处理, 得出了可靠和满意的结果.

关键词: 振动台测量控制系统, 动态I/O特性标定, 数据采集

Abstract: In this paper, we have introduced a measuring and controlling system of vibrometer;standardizing technology on gvalue of vibrometer and introduced especially technology to reduce the standardizing errors. On the basis, we have introduced communication and programming technique in this data acquisition with model HP34401A digital multimeter and computer. By utilizing this system , we standardize and collect many I/O characteristic curve for instrument grade piezoresistive silicon accelerometer jointly developed by ourselves. We have obtained satis fyingly reliable results.

Key words: measuring and controlling system of vibrometer, standardizing technology on dynamic I/O characteristic curve, data acquisition technique

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